## N, H and C-atoms Density in Flowing Afterglows of Microwave R/N2-H2 and R/N2-CH4 Discharges with R=N2, He, Ar and Applications to TiO2 Surface Nitriding

The density of N, H, and C atoms in microwave R/N2-H2 and R/N2-CH4 discharges with R=N2, He, and Ar has been calculated along the reduced pressure flowing afterglows. The density of H and C atoms, as well as other nitrogen active species such as N2(A), N2(X,v>13), N2+,NH, N(2D), CN,...

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